Publication Type:Journal Article
Source:Applied Physics Letters, Volume 73, Number 3, p.318-320 (1998)
A study of vacancy-related defects in ferroelectric capacitors was performed using a variable energy positron beam (VEPB). Heterostructures of (Pb0.9La0.1)(Zr0.2Ti0.8)O 3 (PLZT) ferroelectric with La0.5Sr0.5CoO3 (LSCO) electrodes were deposited by pulsed laser deposition and the effects of oxygen deficiency studied using structures grown with 760 and 1×10-5Torr oxygen. The VEPB depth profile showed an increase in vacancy-related defects with increased oxygen nonstoichiometry. A study of LSCO and PLZT thin films was also performed. The formation of vacancy clusters in the LSCO top electrode, and VPb-VO defects in the PLZT layer, with increased oxygen deficiency is inferred. © 1998 American Institute of Physics.
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