Study of microstructure in SrTiO3/Si by high-resolution transmission electron microscopy
Publication Type
Journal Article
Authors
Yang, G.Y, J.M Finder, J Wang, Z.L Wang, Z Yu, J Ramdani, R Droopad, K.W Eisenbeiser, Ramamoorthy Ramesh
DOI
Abstract
Microstructure in the SrTiO3/Si system has been studied using high-resolution transmission electron microscopy and image simulations. SrTiO3 grows heteroepitaxially on Si with the orientation relationship given by (001)STO//(001)Si and [100]STO//[110]Si. The lattice misfit between the SrTiO3 thin films and the Si substrate is accommodated by the presence of interfacial dislocations at the Si substrate side. The interface most likely consists of Si bonded to O in SrTiO3. The alternative presentation of Sr and Si atoms along the interface leads to the formation of 2× and 3× Sr configurations. Structural defects in the SrTiO3 thin film mainly consist of tilted domains and dislocations.
Journal
Journal of Materials Research
Volume
17
Year of Publication
2002
ISSN
08842914
Notes
cited By 30