Room temperature thin film BaxSr1-xTiO3 Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice
Van Keuls, F.W., C.H. Mueller, F.A. Miranda, R.R. Romanofsky, C.L. Canedy, S. Aggarwal, T. Venkatesan, Ramamoorthy Ramesh, J.S. Horwitz, W. L. Chang, W.J. Kim
We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of BaxSr1-xTiO3. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO3 and MgO.
IEEE MTT-S International Microwave Symposium Digest
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