Room temperature thin film BaxSr1-xTiO3 Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice

Publication Type:

Conference Paper


IEEE MTT-S International Microwave Symposium Digest, IEEE, Piscataway, NJ, United States, Volume 2, p.737-740 (1999)


We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of BaxSr1-xTiO3. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO3 and MgO.


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