Publication Type:Conference Paper
Source:IEEE MTT-S International Microwave Symposium Digest, IEEE, Piscataway, NJ, United States, Volume 2, p.737-740 (1999)
Keywords:annealing, Antenna phased arrays, Barium compounds, Coupled microstrip phase shifters, Ferroelectric materials, Film thickness, lanthanum compounds, Magnesia, Manganese, Microstrip devices, Permittivity, Phase shifters, Semiconductor doping, substrates, Thin ferroelectric films, thin films
We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of BaxSr1-xTiO3. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO3 and MgO.
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