Publication Type:Journal Article
Source:Applied Physics Letters, Volume 81, Number 22, p.4215-4217 (2002)
Keywords:Capacitors, Epitaxial growth, Ferroelectric materials, Lead compounds, Magnetic field effects, Microscopic examination, nanostructured materials, PHASE DIAGRAMS, piezoelectricity, Scanning force microscopy, thermodynamics, thin films
The measurement of out-of-plane piezoelectric response of submicron capacitors fabricated from epitaxial lead zirconate titanate thin films, using piezoresponse scanning force microscopy was reported. It was found that there was a good agreement between the experimentally measured values of d33 for clamped and submicron capacitors and the predictions from thermodynamic theory. The results showed that for submicron capacitors in compositions closer to morphotropic boundary, the field-dependent piezoresponse was different from that predicted by the theoritical calculations.
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