Oxide electrodes as barriers to hydrogen damage of Pb(Zr,Ti)O3-based ferroelectric capacitors

Publication Type

Journal Article

Authors

DOI

Abstract

The use of (La,Sr)CoO3 (LSCO) oxide electrodes as diffusion barriers to hydrogen is investigated during forming gas anneals (FGA). After FGA, almost no bipolar fatigue up to 1011 cycles, good logic state retention, and no imprint at 100 °C are exhibited by the ferroelectric capacitors.

Journal

Applied Physics Letters

Volume

74

Year of Publication

1999

ISSN

00036951

Research Areas