Publication Type:Journal Article
Source:Applied Physics Letters, Volume 85, Number 2, p.278-280 (2004)
Keywords:Elastic moduli, Electric field effects, Ferroelectric thin films, Full width at half maximum (FWHM), Lithography, Matrix algebra, Metallorganic chemical vapor deposition, Piezoelectric constants, piezoelectricity, Piezoresponse microscopy, Single crystals, Substrate-clamped films, Vectors
The general expressions for the effective piezoelectric constants for substrate-clamped films as function of film orientation were discussed. The piezoelectric constants of films with a tetragonal crystallographic structure were calculated for typical orientations. The piezoelectric constants were measured experimentally for single domain ferroelectric Pb(Zr 0.2Ti 0.8)O 3 thin films. The theoretical results were found to be in good agreement with the experimental observations.
cited By 32