Orientation dependence of the converse piezoelectric constants for epitaxial single domain ferroelectric films

Publication Type:

Journal Article

Authors:

J. Ouyang; S.Y. Yang; L. Chen; Ramamoorthy Ramesh; A.L. Roytburd

Source:

Applied Physics Letters, Volume 85, Number 2, p.278-280 (2004)

Keywords:

Elastic moduli, Electric field effects, Ferroelectric thin films, Full width at half maximum (FWHM), Lithography, Matrix algebra, Metallorganic chemical vapor deposition, Piezoelectric constants, piezoelectricity, Piezoresponse microscopy, Single crystals, Substrate-clamped films, Vectors

Abstract:

The general expressions for the effective piezoelectric constants for substrate-clamped films as function of film orientation were discussed. The piezoelectric constants of films with a tetragonal crystallographic structure were calculated for typical orientations. The piezoelectric constants were measured experimentally for single domain ferroelectric Pb(Zr 0.2Ti 0.8)O 3 thin films. The theoretical results were found to be in good agreement with the experimental observations.

Notes:

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