Microstructure of epitaxial oxide thin film heterostructures on silicon by pulsed laser deposition

Publication Type:

Journal Article


Applied Physics Letters, Volume 64, Number 25, p.3407-3409 (1994)


The microstructure of epitaxial La0.5Sr0.5CoO 3(LSCO)/ferroelectric lanthanum modified lead zirconate titanate (PLZT)/ La0.5Sr0.5CoO3(LSCO)/bismuth titanate(BT)/yttria-stabilized zirconia (YSZ) heterostructures on [001] silicon has been investigated. X-ray diffraction and pole figure analysis reveal epitaxial growth of the PLZT, LSCO, BT, and YSZ layers. High resolution transmission electron microscopy was done to study the crystal defects and interfacial structure.


cited By 15