Imaging of microwave permittivity, tunability, and damage recover in (Ba, Sr)TiO3 thin films
Steinhauer, D.E., C.P. Vlahacos, F.C. Wellstood, S.M. Anlage, C. Canedy, Ramamoorthy Ramesh, A. Stanishevsky, J. Melngailis
We describe the use of a near-field scanning microwave microscope to quantitatively image the dielectric permittivity and tunability of thin-film dielectric samples on a length scale of 1 μm. We demonstrate this technique with permittivity images and local hysteresis loops of a 370-nm-thick Ba0.6Sr0.4TiO3 thin film at 7.2 GHz. We also observe the role of annealing in the recovery of dielectric tunability in a damaged region of the thin film. We can measure changes in relative permittivity εr as small as 2 at εr = 500, and changes in dielectric tunability dεr/dV as small as 0.03 V-1. © 1999 American Institute of Physics.
Applied Physics Letters
Year of Publication