Giant piezoelectricity on Si for hyperactive MEMS

Publication Type

Journal Article

Authors

DOI

Abstract

{Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg 1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31

Journal

Science

Volume

334

Year of Publication

2011

ISSN

00368075

Notes

cited By 262

Research Areas