Publication Type:Conference Paper
Source:Materials Research Society Symposium - Proceedings, Volume 782, p.415-420 (2003)
Keywords:Electrostatic force microscopy, etching, Ferroelectric materials, hysteresis, Lead compounds, Nanorods, nanostructured materials, Parameter estimation, Pore size, Precursors, thin films, Tubes (components), Wetting
Wetting of the pore walls of porous templates is a simple and convenient method to prepare nanoshell tubes. Wafer-scale fabrication of ferroelectric lead zirconate titanate and barium titanate nanoshell tubes was accomplished by wetting porous silicon templates with polymeric precursors. The ferro- and piezoelectric properties of an individual ferroelectric nanoshell tube either of PZT or of BaTiO3 were electrically characterized by measuring the local piezoelectric hysteresis. A sharp switching at the coercive voltage of about 2 V was shown from the hysteresis loop. The corresponding effective remnant piezoelectric coefficient is about 90 pm/V. We have also prepared highly ordered arrays of free-standing ferroelectric nanoshell tubes obtained by partial etching of the silicon template. Such materials might be used as building blocks of miniaturized devices and could have a significant impact in the field of nano-electromechanical systems.
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