Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers
Publication Type
Journal Article
Authors
Wang, Y., C. Ganpule, B.T. Liu, H. Li, K. Mori, B. Hill, M. Wuttig, Ramamoorthy Ramesh, J. Finder, Z. Yu, R. Droopad, K. Eisenbeiser
DOI
Abstract
In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.
Journal
Applied Physics Letters
Volume
80
Year of Publication
2002
ISSN
00036951