Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers

Publication Type:

Journal Article

Authors:

Y. Wang; C. Ganpule; B.T. Liu; H. Li; K. Mori; B. Hill; M. Wuttig; Ramamoorthy Ramesh; J. Finder; Z. Yu; R. Droopad; K. Eisenbeiser

Source:

Applied Physics Letters, Volume 80, Number 1, p.97-99 (2002)

Keywords:

cobalt compounds, Epitaxial ferroelectric, Epitaxial films, Epitaxial growth, ferroelectricity, In-plane, lead, Out-of-plane, Pb(Zr, Perovskite, Polycrystalline film, PZT, Remnant polarizations, Semiconducting silicon compounds, SrTiO, Strontium alloys, Strontium titanates, Template layers, Ti)O, X ray diffraction, X-ray diffraction studies, zirconium

Abstract:

In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.

Notes:

cited By 126