Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers

Publication Type:

Journal Article


Applied Physics Letters, Volume 80, Number 1, p.97-99 (2002)


In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.


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