Effective direct piezoelectric constants in epitaxial ferroelectric films as MEMS sensors

Publication Type:

Conference Paper

Authors:

J. Ouyang; Ramamoorthy Ramesh; A.L. Roytburd

Source:

Materials Research Society Symposium Proceedings, Volume 881, p.125-130 (2005)

ISBN:

1558998357; 9781558998353

Keywords:

Epitaxial films, Ferroelectric films, Lead compounds, MEMS, Orientation dependence, Piezoelectric constant, Piezoelectric materials, Sensor devices, sensors, Si substrates, silicon

Abstract:

Following our previous work on the converse piezoelectric constant-d 33.fC in epitaxial ferroelectric films for MEMS actuator applications', the orientation dependence of the direct piezoelectric constants d33,fD, d31.fD and d 33,fD are generally formulated, which can help to predict and optimize the performance of piezoelectric MEMS sensor devices based on ferroelectric thin films. Numerical results are obtained and discussed for Pb(ZrxTi1-x)O3 thin films grow on Si substrates with various compositions and structures. © 2005 Materials Research Society.

Notes:

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