Depth profile study of ferroelectric PbZr0.2Ti0.8O3 films
Depth profile study of ferroelectric PbZr0.2Ti0.8O3 films was carried out using grazing incident x-ray scattering (GIXS) method. GIXS measurements show the evolution of in-plane compression of the lattice parameter as a function of depth within the films. The results indicate that measured in-plane lattice parameters are asymmetric, which suggest an orthorhombic distortion of the lattice in the plane of the films.
Journal of Applied Physics
Year of Publication