Depth profile study of ferroelectric PbZr0.2Ti0.8O3 films

Publication Type:

Journal Article

Source:

Journal of Applied Physics, Volume 92, Number 11, p.6762-6767 (2002)

Abstract:

Depth profile study of ferroelectric PbZr0.2Ti0.8O3 films was carried out using grazing incident x-ray scattering (GIXS) method. GIXS measurements show the evolution of in-plane compression of the lattice parameter as a function of depth within the films. The results indicate that measured in-plane lattice parameters are asymmetric, which suggest an orthorhombic distortion of the lattice in the plane of the films.

Notes:

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