Analysis of thin PZT films as a function of depth and thickness by GIXS
Publication Type
Journal Article
Authors
DOI
Abstract
We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint.
Journal
Integrated Ferroelectrics
Volume
29
Year of Publication
2000
ISSN
10584587
Notes
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