Publication Type:Journal Article
Source:Integrated Ferroelectrics, Taylor and Francis Inc., Volume 29, Number 1-2, p.127-141 (2000)
Keywords:Depth analysis, Epitaxial ferroelectric films, excimer lasers, Film structure, Grazing incidence X ray scattering, lanthanum compounds, lattice constants, Lead zirconate titanate, Mapping, Pulsed laser applications, Semiconducting lead compounds, Strain, thin films, X ray scattering
We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint.
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